C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded This Guide addresses universal alignment

This Guide addresses universal alignment mark

and at other times as seems necessary

previously published in 1995

originally published in 1984

C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded This Guide addresses universal alignmentThis Document is a recommended guide to evaluate the efficacy of filter elements used in ultrapure water (UPW) fluid streams, providing particle control as risk mitigation for particle contamination on the wafer. Due to the lack of adequate on line particle detection metrology at the particle sizes addressed by this Guide, however off line filter performance testing can be used to validate filter retention efficiency. Off line filter performance